The fabrication of current collector-contained in-plane micro-supercapacitor (MSC) usually requires the patterning of the current collector first and the subsequent patterning of the active material with the assistance of photoresist and mask. However, this two-step patterning process is too complicated and the photoresist used is harmful to the properties of nanomaterials. Here, we demonstrate a one-step mask-free strategy to pattern the current collector and the active material at the same time for the fabrication of all-solid-state flexible in-plane MSC. Silver nanowires (AgNWs) are used as the current collector. An atmospheric pressure pulsed cold micro-plasma-jet is used to realize the one-step mask-free production of interdigitated carbon nanotube (CNT)/AgNW electrodes. Remarkably, the fabricated CNT/AgNW based MSC shows good flexibility and excellent rate capability. Moreover, the performances including cyclic stability, equivalent series resistance, relaxation time and energy/power densities of the CNT/AgNW based MSC are significantly enhanced with the presence of AgNW current collector.
